Temperature, pressure and flow are three major detection parameters in industry. Among them, flow detection has a long history.

In recent years, with the in-depth research and progress of micro electro mechanical system (MEMS), the traditional flow sensor in industrial and hydrodynamics research is developing towards high integration, miniaturization, high precision and high reliability. Micro flow sensor has become an important research direction of MEMS.

MEMS flow sensors have many applications, such as sensing environmental flow, industrial gas flow monitoring, flow sensing in biomedical applications and marine hydrodynamic sensing. The compact size, high sensitivity, low price and mass production function of MEMS flow sensor make it very attractive in commercial and industrial applications.

Product principle

The flow chip of MEMS thermal flow sensor is composed of two thermocouple stacks and a heating resistor. The thermocouple stack is symmetrically distributed upstream and downstream of the heating resistor, and the thermal junction of the heating resistor and the thermocouple stack is on a heat insulation base.

The heating resistor heats the hot junction of the thermocouple. The temperature gradient between the hot junction and the cold junction of the thermocouple leads to the output voltage. When the fluid is still, the temperature at the symmetrical position on both sides of the heating resistance is the same; When the fluid flows from right to left, the isotherm tilts to the left, the temperature at the symmetrical positions on both sides of the heating resistance is no longer the same, and the temperature difference can be measured by the thermocouple stack placed on both sides of the heating resistance.

Because the heat transfer of fluid is only related to the fluid mass and heat capacity, the sensor can directly measure the fluid mass flow.

Product features

New generation MEMS sensor chip technology

High precision, fast response and good repeatability

It can accurately measure very small flow

Fully calibrated and temperature compensated

Product application field

The micro flow sensor uses the principle of thermodynamics to detect the flow of gas medium in the convection channel, which has good accuracy and repeatability. It plays an important role in industrial production, scientific experiment, product quality control, production efficiency improvement, energy conservation and so on.